Micromachined transducers sourcebook / Gregory T.A. Kovacs.
By: Kovacs, Gregory T. A
.
Material type: 
BookPublisher: Boston, Ma. : WCB, 1998Description: xx, 911, 3 p. : ill. ; 25 cm. + hbk.ISBN: 0072907223.Subject(s): Transducers | Microelectromechanical systemsDDC classification: 681.2 | Item type | Current library | Call number | Copy number | Status | Date due | Barcode | Item holds |
|---|---|---|---|---|---|---|---|
| General Lending | MTU Bishopstown Library Lending | 681.2 (Browse shelf(Opens below)) | 1 | Available | 00092153 |
Enhanced descriptions from Syndetics:
Provides an overview of the field, beginning with micromachining approaches and then covering the various major categories of transduction. This book takes a practical approach to the subject, and studies key design issues by examining the fabrication of different devices.
Includes bibliographical references (pages 883-899) and index.
Micromachining techniques -- Mechanical transducers -- Optical transducers -- Ionizing radiation transducers -- Thermal transducers -- Magnetic & Electromagnetic transducers -- Chemical and biological transducers -- Microfluidic devices.
Table of contents provided by Syndetics
- 1 Introduction and Overview
- 2 Micromachining Techniques
- 3 Mechanical Transducers
- 4 Optical Transducers
- 5 Ionizing Radiation Transducers
- 6 Thermal Transducers
- 7 Magnetic & Electromagnetic Transducers
- 8 Chemical & Biological Transducers
- 9 Microfluidic Devices