Micromachined transducers sourcebook /
Kovacs, Gregory T. A.
Micromachined transducers sourcebook / Gregory T.A. Kovacs. - Boston, Ma. : WCB, 1998. - xx, 911, 3 p. : ill. ; 25 cm. + hbk.
Includes bibliographical references (pages 883-899) and index.
Micromachining techniques -- Mechanical transducers -- Optical transducers -- Ionizing radiation transducers -- Thermal transducers -- Magnetic & Electromagnetic transducers -- Chemical and biological transducers -- Microfluidic devices.
0072907223
98004846
Transducers.
Microelectromechanical systems.
681.2
Micromachined transducers sourcebook / Gregory T.A. Kovacs. - Boston, Ma. : WCB, 1998. - xx, 911, 3 p. : ill. ; 25 cm. + hbk.
Includes bibliographical references (pages 883-899) and index.
Micromachining techniques -- Mechanical transducers -- Optical transducers -- Ionizing radiation transducers -- Thermal transducers -- Magnetic & Electromagnetic transducers -- Chemical and biological transducers -- Microfluidic devices.
0072907223
98004846
Transducers.
Microelectromechanical systems.
681.2