MTU Cork Library Catalogue

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An introduction to microelectromechanical systems engineering / Nadim Maluf.

By: Maluf, Nadim.
Material type: materialTypeLabelBookSeries: Microelectromechanical systems series.Publisher: Boston : Artech House, c2000Description: xix, 265 p. : ill. ; 24 cm. + hbk.ISBN: 0890065810 (alk. paper).Subject(s): Microelectromechanical systemsDDC classification: 621.381
Contents:
MEMS: a technology from Lilliput -- The sandbox: materials for MEMS -- The toolbox: processes for micromachining -- The gearbox: commercial MEM structures and systems -- The new gearbox: a peek into the future -- The box: packaging for MEMS.
Holdings
Item type Current library Call number Copy number Status Date due Barcode Item holds
General Lending MTU Bishopstown Library Lending 621.381 (Browse shelf(Opens below)) 1 Available 00092139
Total holds: 0

Enhanced descriptions from Syndetics:

A non-technical introduction to the field of microelectromechanical systems (MEMS). It describes in detail the materials used in producing MEMS - including silicon, polymers and glass and quartz substrates - as well as MEMS design for nozzles, sensors, valves and other applications. It examines the manufacture of commercial MEMS using technologies such as oxidation, lithography, chemical vapour deposition and silicon fusion bonding and applications in a wide range of industries including data storage, telecommunications, consumer, automotive, medical and defence. The book also addresses the future of MEMS - its potential for microelectrode arrays, actuators and optical switches and other technologies.

Includes bibliographical references and index.

MEMS: a technology from Lilliput -- The sandbox: materials for MEMS -- The toolbox: processes for micromachining -- The gearbox: commercial MEM structures and systems -- The new gearbox: a peek into the future -- The box: packaging for MEMS.

Table of contents provided by Syndetics

  • MEMS: A Technology from Lilliput
  • The Sandbox: Materials for MEMS
  • The Toolbox: Processes for Micromachining
  • MEM Structure and Systems in Industrial and Automotive Applications
  • Optical MEM Structures and Systems
  • MEM Structures and Systems for Medical Applications
  • MEM Structures and Systems for Electronic Applications
  • Packaging & Reliability for MEMS
  • Glossary

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