An introduction to microelectromechanical systems engineering /
Maluf, Nadim.
An introduction to microelectromechanical systems engineering / Nadim Maluf. - Boston : Artech House, c2000. - xix, 265 p. : ill. ; 24 cm. + hbk. - Microelectromechanical systems series .
Includes bibliographical references and index.
MEMS: a technology from Lilliput -- The sandbox: materials for MEMS -- The toolbox: processes for micromachining -- The gearbox: commercial MEM structures and systems -- The new gearbox: a peek into the future -- The box: packaging for MEMS.
0890065810 (alk. paper)
99052406
Microelectromechanical systems.
621.381
An introduction to microelectromechanical systems engineering / Nadim Maluf. - Boston : Artech House, c2000. - xix, 265 p. : ill. ; 24 cm. + hbk. - Microelectromechanical systems series .
Includes bibliographical references and index.
MEMS: a technology from Lilliput -- The sandbox: materials for MEMS -- The toolbox: processes for micromachining -- The gearbox: commercial MEM structures and systems -- The new gearbox: a peek into the future -- The box: packaging for MEMS.
0890065810 (alk. paper)
99052406
Microelectromechanical systems.
621.381