MTU Cork Library Catalogue

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SEM microcharacterization of semiconductors / edited by D. B. Holt, D. C. Joy.

Contributor(s): Holt, D. B | Joy, David C, 1943-.
Material type: materialTypeLabelBookSeries: Techniques of physics.Publisher: [London] : Academic, c1989Description: xiii, 452 p.ISBN: 0123538556.Subject(s): SemiconductorsDDC classification: 621.38152
Contents:
Part A: Foundations of microcharacterization in electron beam instruments -- An introduction to multimode scanning electron microscopy / D. B. Holt -- Modeling electron beam interactions in semiconductors / D. E. Newbury -- Electron channeling patterns / D. C. Joy -- The emissive mode and x-ray microanalysis / D. C. Joy -- Part B: Quantitation and the interpretation of signals in the individual modes -- Voltage contrast and stroboscopy / S. M. Davidson -- The conductive mode / D. B. Holt -- Scanning deep level transient spectroscopy / O. Breitenstein and J. Heydenreich -- Cathodoluminescence characterization of semiconductors / D. B. Holt and B. G. Yacobi -- The electron acoustic mode / L. J. Balk.
Holdings
Item type Current library Call number Copy number Status Date due Barcode Item holds
General Lending MTU Bishopstown Library Lending 621.38152 (Browse shelf(Opens below)) 1 Available 00027384
Total holds: 0

Enhanced descriptions from Syndetics:

Applications of SEM techniques of microcharacterization have proliferated to cover every type of material and virtually every branch of science and technology. This book emphasizes the fundamental physical principles. The first section deals with the foundation of microcharacterization in electron beam instruments and the second deals with the interpretation of the information obtained in the main operating modes of a scanning electron microscope.

Includes bibliographical references and index.

Part A: Foundations of microcharacterization in electron beam instruments -- An introduction to multimode scanning electron microscopy / D. B. Holt -- Modeling electron beam interactions in semiconductors / D. E. Newbury -- Electron channeling patterns / D. C. Joy -- The emissive mode and x-ray microanalysis / D. C. Joy -- Part B: Quantitation and the interpretation of signals in the individual modes -- Voltage contrast and stroboscopy / S. M. Davidson -- The conductive mode / D. B. Holt -- Scanning deep level transient spectroscopy / O. Breitenstein and J. Heydenreich -- Cathodoluminescence characterization of semiconductors / D. B. Holt and B. G. Yacobi -- The electron acoustic mode / L. J. Balk.

Table of contents provided by Syndetics

  • Foundations of Microcharacterization in Electron Beam Instruments
  • An Introduction to Multi-Mode Scanning Electron Microscopy
  • Modeling Electron Beam Interactions in Semiconductors
  • Channeling Patterns
  • The Emissive Mode and X-ray Microanalysis
  • Quantitation and the Interpretation of Signals in the Individual Modes
  • Voltage Contrast and Stroboscopy
  • The Conductive Mode
  • Scanning Deep Level Transient Spectroscopy
  • Cathodoluminescence Characterization of Semiconductors
  • The Electroacoustic Mode

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