Microelectronic processing : an introduction to the manufacture of integrated circuits / W. Scot Ruska.
By: Ruska, W. Scot (Walter Scot)
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Material type: ![materialTypeLabel](/opac-tmpl/lib/famfamfam/BK.png)
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Item type | Current library | Call number | Copy number | Status | Date due | Barcode | Item holds |
---|---|---|---|---|---|---|---|
General Lending | MTU Bishopstown Library Lending | 621.3815 (Browse shelf(Opens below)) | 1 | Available | 00076391 |
Includes bibliographical references and index.
A perspective on microelectronic processing -- The physics and chemistry of semiconductors -- Dopont diffusion and related operations -- Photolithography -- Image creation -- Etching -- Thin films: mainly metals -- Thin films: mainly nonmetals -- Ion beams and their applications -- The fabrication of bipolar devices -- Fabrication of MOS devices -- Fabrication of nonsilicon devices.