O'Donoghue, Eoghan. <br/><br/>
Analytical and FEA analysis of silicon micro-machined capacitive pressure sensor / 
Eoghan O'Donoghue.  
 - Cork :  Cork Institute of Technology,  2003. 
 - x, 238 p. ;  30 cm. +  hbk. 
 - M.Eng - Mechanical and Manufacturing Engineering .
<br/><br/>Thesis (M.Eng.) - Cork Institute of Technology, 2003. 
<br/><br/>Includes bibliographical references. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Detectors--Design and construction.<br/>Engineering instruments<br/>Pressure transducers.<br/>Finite element method.<br/>Electromechanical devices.
<br/><br/><label>Dewey Class. No.: </label>THESES PRESS