Maluf, Nadim. <br/><br/>
An introduction to microelectromechanical systems engineering / 
Nadim Maluf. 
 - Boston :  Artech House,  c2000. 
 - xix, 265 p. :  ill. ;  24 cm. +  hbk. 
 - Microelectromechanical systems series .
<br/><br/>Includes bibliographical references and index. 
<br/><br/>MEMS:  a technology from Lilliput -- The sandbox:  materials for MEMS -- The toolbox:  processes for micromachining -- The gearbox:  commercial MEM structures and systems -- The new gearbox:  a peek into the future -- The box:  packaging for MEMS. 
<br/><br/><label>ISBN: </label>0890065810 (alk. paper) 
<br/><br/><label>LCCN: </label>99052406 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.
<br/><br/><label>Dewey Class. No.: </label>621.381