Kovacs, Gregory T. A.
Micromachined transducers sourcebook /
Gregory T.A. Kovacs.
- Boston, Ma. : WCB, 1998.
- xx, 911, 3 p. : ill. ; 25 cm. + hbk.
Includes bibliographical references (pages 883-899) and index.
Micromachining techniques -- Mechanical transducers -- Optical transducers -- Ionizing radiation transducers -- Thermal transducers -- Magnetic & Electromagnetic transducers -- Chemical and biological transducers -- Microfluidic devices.
0072907223
98004846
Transducers.
Microelectromechanical systems.
681.2