High dielectric constant materials : VLSI MOSFET applications /
edited by Howard Huff and D.C. Gilmer.
- New York, NY : Springer-Verlag Berlin Heidelberg, 2005.
- xxiv, 710 p. :/bill. ; 25 cm. + hbk.
- Springer series in advanced microelectronics ; 1437-0387 .
Includes bibliographical references and index.
The economic implications of Moore's law / G. D. Hutcheson -- Part I: Classical regime for SiO2 -- Brief notes on the history of gate dielectrics in MOS devices / E. Kooi, A. Schmitz -- SiO2 based MOSFETS: Film growth and Si-SiO2 interface properties / E. A. Irene -- Oxide reliability issues / R. Degraeve -- Part II: Transition to silicon oxynitrides -- Gate dielectric scaling to 2.0-1.0nm: SiO2 and silicon oxynitride / S. -H. Lo and Y. Taur -- Optimal scaling methodologies and transistor performances / T. Skotnicki, F. Boeuf -- Silicon oxynitride gate dielectric for reducing gate leakage and boron penetration prior to high-k gate dielectric implementation / H. -H. Tseng -- Part III: Transition to high-k gate dielectrics -- Alternative dielectrics for silicon-based transistors: selection via multiple criteria / J. -P. Maria -- Materials issues for high-k gate dielectric selection and integration / R. M. Wallace, G. D. Wilk -- Designing interface composition and structure in high dielectric constant gate stacks / G. N. Parsons -- Electronic structure of alternative high-k dielectrics / G. Lucovsky, J. L. Whitten -- Physicochemical properties of selected 4d, 5d and rare earth metals in silicon / A. A. Istratov, E. R. Weber -- High-k gate dielectric deposition technologies / J. P. Chang -- Issues in metal gate electrode selection for bulk CMOS devices / V. Misra -- CMOS IC fabrication issues for high-k gate dielectric and alternate electrode materials / L. Colombo, A. L. P. Rotondaro, M. R. Visokay, J. J. Chambers -- Characterization and metrology of medium dielectric constant gate dielectric films / A. C. Diebold, W. W. Chism -- Electrical measurement issues for alternative gate stack systems / G. A. Brown -- High-k gate dielectric materials integrated circuit device design issues / Y. -Y. Fan, S. P. Mudanai, W. Chen, L. F. Register, S. K. Banerjee -- Part IV: Future directions for ultimate scaling technology generations -- High-k crystalline gate dielectrics: a research perpective / F. J. Walker, R. A. McKee -- High-k crystalline gate dielectrics: an IC manufacturer's perspective / R. Droopad, K. Eisenbeiser, A. A. Demkov -- Advanced MOS-devices / J. Boker, T. -J. King, J. Hergenrother, J. Bude, D. Muller, T. Skotnicki, S. Monfray, G. Timp.
3540210814
2004105869
Microelectronics. Integrated circuits--Very large scale integration. Metal oxide semiconductor field-effect transistors. Dielectrics.