Ruska, W. Scot <br/><br/>
Microelectronic processing :  an introduction to the manufacture of integrated circuits / 
W. Scot Ruska. 
 - New York :  McGraw-Hill,  1987. 
 - xviii, 430 p. :  ill. ;  24 cm. +  hbk. 
 - McGraw-Hill series in electrical engineering .
<br/><br/>Includes bibliographical references and index. 
<br/><br/>A perspective on microelectronic processing -- The physics and chemistry of semiconductors -- Dopont diffusion and related operations -- Photolithography -- Image creation -- Etching -- Thin films:  mainly metals -- Thin films:  mainly nonmetals -- Ion beams and their applications -- The fabrication of bipolar devices -- Fabrication of MOS devices -- Fabrication of nonsilicon devices. 
<br/><br/><label>ISBN: </label>0070542805  0070542813  
<br/><br/><label>LCCN: </label>86015362 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Design and construction.
<br/><br/><label>Dewey Class. No.: </label>621.3815