Evans, K. <br/><br/>
Cleanroom technology manual / 
K. Evans ... [et al.]. 
 - CA :  Semiconductor Services,  c1990. 
 - 30 p. :  ill. ;  26 cm +  spiral. 
<br/><br/> Cover title: Cleanroom technology : companion study guide to cleanroom technology & procedures video training course. 
<br/><br/>Includes index. 
<br/><br/>Part 1 -- Introduction -- Contamination -- Particulates -- Chemical sources of dirt -- Bacterial contamination -- Static -- Class number and particulate size -- Four part maintenance program -- Personal hygiene -- Entering the gowning area -- Getting dressed -- Entering the clean room -- Review of Part 1 -- Part 2 -- In the cleanroom -- Materials -- Maintaining VLF to control particulate contamination -- VLF workstation -- Full area cleanrooms -- Cleanroom tunnels -- Static control -- Station cleanup -- Review of Part 2. 
<br/><br/><label>ISBN: </label>0961388056  
<br/><br/><label>Subjects--Topical Terms: </label><br/>Clean rooms
<br/><br/><label>Dewey Class. No.: </label>620.86