IEST-RP-CC018.2 : cleanroom housekeeping operating and monitoring procedures /Institute of Environmental Sciences and Technology. Working Group 018 of the Standards and Practices Committee of the Contamination Control Division.
- Mount Prospect,ILL : Institute of Environmental Sciences, 1995
- 23 p. ; 28 cm. + pbk.
This practice supersedes IEST-RP-CC-018-89-T and IEST-RP-CC018.1.
Scope and limitations -- References -- Terms and definitions -- Particles on surfaces: adhesion and removal -- Procedures -- Test methods.