IEST-RP-CC018.2 : cleanroom housekeeping operating and monitoring procedures /Institute of Environmental Sciences and Technology. Working Group 018 of the Standards and Practices Committee of the Contamination Control Division. - Mount Prospect,ILL : Institute of Environmental Sciences, 1995 - 23 p. ; 28 cm. + pbk.

This practice supersedes IEST-RP-CC-018-89-T and IEST-RP-CC018.1.

Scope and limitations -- References -- Terms and definitions -- Particles on surfaces: adhesion and removal -- Procedures -- Test methods.

1877862363


Clean rooms.

620.86