Delchar, T. A.

Vacuum physics and techniques / T.A. Delchar. - London ; New York : Chapman & Hall, 1993. - viii, 253 p. : ill. ; 22 cm. - Physics and its applications ; 6 . - Physics and its applications ; 6 .

Includes bibliographical references (p. 246-247) and index.

Some aspects of kinetic theory -- Flow of gases through tubes and orifices -- Physisorption, chemisorption and other surface effects -- Vacuum pumps: the physical principles -- Pressure measurement -- Vacuum system design -- Construction accessories and materials -- Leak detection -- Vacuum systems in practice.

0412465906

92021136


Vacuum.
Vacuum technology.

621.55