Vacuum physics and techniques /
T.A. Delchar.
- London ; New York : Chapman & Hall, 1993.
- viii, 253 p. : ill. ; 22 cm.
- Physics and its applications ; 6 .
- Physics and its applications ; 6 .
Includes bibliographical references (p. 246-247) and index.
Some aspects of kinetic theory -- Flow of gases through tubes and orifices -- Physisorption, chemisorption and other surface effects -- Vacuum pumps: the physical principles -- Pressure measurement -- Vacuum system design -- Construction accessories and materials -- Leak detection -- Vacuum systems in practice.