Gardner, J. W. 1958-

Microsensors : principles and applications / Julian W. Gardner.. - Chichester, England : Wiley, c1994. - xii, 331 p. : ill. ; 25 cm. + pbk.

Includes bibliographical references and index.

Sensor Signals and Interfacing -- Conventional Silicon Processing -- Specialised Materials Processing -- Thermal Microsensors -- Radiation Microsensors -- Mechanical Microsensors -- Magnetic Microsensors -- (Bio)chemical Microsensors -- Microsensor Performance -- Smart Sensors -- Microsensor Array Devices.

0471941352 0471941360

94010066


Transducers.
Detectors.
Microelectronics.

681.2