Gardner, J. W. 1958-
Microsensors : principles and applications /
Julian W. Gardner..
- Chichester, England : Wiley, c1994.
- xii, 331 p. : ill. ; 25 cm. + pbk.
Includes bibliographical references and index.
Sensor Signals and Interfacing -- Conventional Silicon Processing -- Specialised Materials Processing -- Thermal Microsensors -- Radiation Microsensors -- Mechanical Microsensors -- Magnetic Microsensors -- (Bio)chemical Microsensors -- Microsensor Performance -- Smart Sensors -- Microsensor Array Devices.
0471941352 0471941360
94010066
Transducers.
Detectors.
Microelectronics.
681.2