Vacuum methods in electron microscopy /
Wilbur C. Bigelow.
- London : Portland, 1994.
- xx, 492 p. : ill ; 23 cm. + pbk.
- Practical methods in electron microscopy ; v.15. .
Includes bibliographical references (pages 463-464) and index.
Vacuum and its characteristics -- The evacuation process -- Vacuum gauges -- Rough vacuum pumps -- Oil diffusion pumps -- Turbomolecular and molecular drag pumps -- Ion, sublimation, and bulk getter pumps -- Cryogenic pumps -- Practical vacuum systems -- Vacuum leaks, seals and greases.