The Chemistry of the semiconductor industry / 
edited by S. J. Moss and A. Ledwith. 
 - Glasgow :  Blackie,  1987. 
 - xiv, 426 p. :  ill. ;  24 cm.   hbk. 
<br/><br/>Includes index. 
<br/><br/>Overview -- Semiconductor silicon -- Group III-V compounds -- Group II-VI semiconductors -- Chemical vapour deposition -- Plasma enhanced chemical vapour deposition -- Metal organic vapour phase epitaxy -- Liquid phase epitaxy of III-V compounds -- Photoresists -- Electron beam and x ray resits -- Wet etching -- Polyimides -- Molecular electronics -- Computer modelling of semiconductor interfaces -- Plasma etching -- Polymers in plasmas. 
<br/><br/><label>ISBN: </label>0216920051 0412013215 
<br/><br/><label>LCCN: </label>86000978 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Design and construction.
<br/><br/><label>Dewey Class. No.: </label>541.0421