The technology and physics of molecular beam epitaxy /
edited by E.H.C. Parker.
- New York : Plenum Press, c1985.
- xx, 686 p. : ill. ; 26 cm.
Includes bibliographical references and index.
Introduction / A. Y. Cho -- III-V MBE growth systems / Graham J. Davies and David Williams -- The growth of the MBE IIII-V compounds and alloys / J. D. Grange -- Dopant incorporation, characteristics and behavior / Colin E. C. Wood -- Properties of III-V layers / M. IIegems -- Compositional superlattices / Leo Esaki -- Modulation-doped AlxGa1-xAs/GaAs heterostructures / H. Morkoc -- Doping superlattices / Gottfried H. Dohler -- MBE of InP and other P-containing compounds / C. R. Stanley, R. F. C. Farrow and P. W. Sullivan --MBE of II-VI compounds / Takafumi Yao -- Silicon molecular beam deposition / Yasuhiro Shiraki -- Metallization by MBE / R. F. C. Farrow -- Insulating layers by MBE / H. C. Casey, Jr. and A. Y. Cho -- III-V microwave devices / J. J. Harris -- Semiconductor lasers and photodetectors / W. T. Tsang -- MBE surface and interface studies / R. Ludeke, R. M. King and E. H. C. Parker -- Comparison and critique of the epitaxial growth technologies / J. D. Grange and D. K. Wickenden -- Retrospect and prospects of MBE / Klaus Ploog.