MTU Cork Library Catalogue

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A user's guide to vacuum technology / John F. O'Hanlon.

By: O'Hanlon, John F, 1937-.
Material type: materialTypeLabelBookPublisher: New York : Wiley, 1989Edition: 2nd ed.Description: xvii, 481 p. : ill. ; 24 cm.ISBN: 0471812420.Subject(s): Vacuum technology -- Handbooks, manuals, etcDDC classification: 621.55
Contents:
ITS Basis -- Vacuum technology -- Gas properties -- Gas flow -- Gas release from solids -- Measurement -- Pressure gauges -- Flow meters -- Pumping speed -- Residual gas analyzers -- Interpretation of RGA data -- Production -- Mechanical pumps -- Turbomolecular pumps -- Diffusion pumps -- Vacuum pump fluids -- Getter and ion pumps -- Cryogenic pumps -- Materials -- Materials in vacuum -- Joints, seals and components -- Lubrication -- Systems -- High vacuum systems -- Ultrahigh vacuum systems -- High flow systems -- Leak detection.
Holdings
Item type Current library Call number Copy number Status Date due Barcode Item holds
General Lending MTU Bishopstown Library Lending 621.55 (Browse shelf(Opens below)) 1 Available 00028037
General Lending MTU Bishopstown Library Lending 621.55 (Browse shelf(Opens below)) 1 Available 00029197
Total holds: 0

Enhanced descriptions from Syndetics:

An introduction to the theory and practice of modern vacuum technology, with applications. Focuses on the understanding, operation, and selection of equipment for vacuum processes used in semiconductor, optical, and related technologies. This 2nd Edition has new information on components, lubrication, pump fluids, and other materials. Basic characteristics and operational procedures are given for each high-vacuum pumping system.

"A Wiley-Interscience publication.".

Includes bibliographical references and index.

ITS Basis -- Vacuum technology -- Gas properties -- Gas flow -- Gas release from solids -- Measurement -- Pressure gauges -- Flow meters -- Pumping speed -- Residual gas analyzers -- Interpretation of RGA data -- Production -- Mechanical pumps -- Turbomolecular pumps -- Diffusion pumps -- Vacuum pump fluids -- Getter and ion pumps -- Cryogenic pumps -- Materials -- Materials in vacuum -- Joints, seals and components -- Lubrication -- Systems -- High vacuum systems -- Ultrahigh vacuum systems -- High flow systems -- Leak detection.

Table of contents provided by Syndetics

  • Its Basis
  • 1. Vacuum Technology (p. 3)
  • 2. Gas Properties (p. 9)
  • 3. Gas Flow (p. 25)
  • 4. Gas Release from Solids (p. 57)
  • Measurement
  • 5. Pressure Gauges (p. 81)
  • 6. Flow Meters (p. 109)
  • 7. Pumping Speed (p. 123)
  • 8. Residual Gas Analyzers (p. 133)
  • 9. Interpretation of RGA Data (p. 161)
  • Production
  • 10. Mechanical Pumps (p. 183)
  • 11. Turbomolecular Pumps (p. 201)
  • 12. Diffusion Pumps (p. 217)
  • 13. Pump Fluids (p. 229)
  • 14. Getter and Ion Pumps (p. 247)
  • 15. Cryogenic Pumps (p. 263)
  • Materials
  • 16. Materials in Vacuum (p. 289)
  • 17. Joints, Seals, and Valves (p. 313)
  • 18. Lubrication (p. 345)
  • Systems
  • 19. Rough Vacuum Pumping (p. 359)
  • 20. High Vacuum Systems (p. 379)
  • 21. Ultraclean Vacuum Systems (p. 403)
  • 22. High Flow Systems (p. 415)
  • 23. Multichamber Systems (p. 431)
  • 24. Leak Detection (p. 447)
  • Symbols (p. 459)
  • Appendixes
  • A. Units and Constants (p. 463)
  • B. Gas Properties (p. 466)
  • C. Material Properties (p. 478)
  • D. Isotopic Abundances (p. 488)
  • E. Cracking Patterns (p. 492)
  • F. Pump Fluid Properties (p. 498)
  • Index (p. 505)

Author notes provided by Syndetics

John F. O'Hanlon, PhD, is Emeritus Professor of Electrical and Computer Engineering at the University of Arizona in Tucson

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