Microelectronic processing : an introduction to the manufacture of integrated circuits / W. Scot Ruska.
By: Ruska, W. Scot (Walter Scot)
.
Material type: 
BookSeries: McGraw-Hill series in electrical engineering.Publisher: New York : McGraw-Hill, 1987Description: xviii, 430 p. : ill. ; 24 cm. + hbk.ISBN: 0070542805 ; 0070542813 .Subject(s): Integrated circuits -- Design and constructionDDC classification: 621.3815 | Item type | Current library | Call number | Copy number | Status | Date due | Barcode | Item holds |
|---|---|---|---|---|---|---|---|
| General Lending | MTU Bishopstown Library Lending | 621.3815 (Browse shelf(Opens below)) | 1 | Available | 00076391 |
Includes bibliographical references and index.
A perspective on microelectronic processing -- The physics and chemistry of semiconductors -- Dopont diffusion and related operations -- Photolithography -- Image creation -- Etching -- Thin films: mainly metals -- Thin films: mainly nonmetals -- Ion beams and their applications -- The fabrication of bipolar devices -- Fabrication of MOS devices -- Fabrication of nonsilicon devices.