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IEST-RP-CC018.2 : cleanroom housekeeping operating and monitoring procedures /Institute of Environmental Sciences and Technology. Working Group 018 of the Standards and Practices Committee of the Contamination Control Division.
By: Institute of Environmental Sciences and Technology. Working Group 018 of the Standards and Practices Committee of the Contamination Control Division.
Material type:
BookPublisher: Mount Prospect,ILL : Institute of Environmental Sciences, 1995 (2001 printing)Description: 23 p. ; 28 cm. + pbk.ISBN: 1877862363.Subject(s): Clean rooms
DDC classification: 620.86
Contents:
Scope and limitations -- References -- Terms and definitions -- Particles on surfaces: adhesion and removal -- Procedures -- Test methods.
| Item type | Current library | Call number | Copy number | Status | Date due | Barcode | Item holds |
|---|---|---|---|---|---|---|---|
| General Lending | MTU Bishopstown Library Lending | 620.86 (Browse shelf(Opens below)) | 1 | Available | 00091999 |
Total holds: 0
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This practice supersedes IEST-RP-CC-018-89-T and IEST-RP-CC018.1.
Scope and limitations -- References -- Terms and definitions -- Particles on surfaces: adhesion and removal -- Procedures -- Test methods.