Processing of electronic materials : proceedings of the first international conference held at Santa Barbara, California, USA, February 23-28, 1987 / editors, Clarence G. Law, Jr. and Richard Pollard ; sponsored by Engineering Foundation.
Contributor(s): Law, Clarence G | Pollard, Richard
| Engineering Foundation (U.S.).
Material type: 
BookPublisher: [New York, N.Y.? : New York, N.Y. : Engineering Foundation?] ; distributed by American Institute of Chemical Engineers, c1987Description: ix, 478 p. : ill. ; 24 cm.ISBN: 0816904278.Subject(s): Electronics -- Materials -- Congresses | Electronics -- Materials -- Design and construction -- Congresses | Manufacturing processes -- CongressesDDC classification: 660.281 | Item type | Current library | Call number | Copy number | Status | Date due | Barcode | Item holds |
|---|---|---|---|---|---|---|---|
| General Lending | MTU Bishopstown Library Lending | 660.281 (Browse shelf(Opens below)) | 1 | Available | 00027369 |
Includes bibliographical references and index.
Chemical vapor deposition / T. W. F. Russell -- Poster Session -- Silicon / R. A. Levy -- Group III - V Semiconductors / L. F. Eastman -- Plasma processes / J. A. Thornton -- Dielectrics / T. E. Seidel -- Group III - V Semiconductors / L. R. Dawson -- Physical vapor deposition / C. J. Summers -- Characterization / G. B. Larrabee -- Group II - VI semiconductors / C. G. Law, Jr. -- Liquid phase processes / W. E. Langlois -- Purification of chemicals / M. P. Dudukovic -- Metals and metal silicides / S. P. Murarka -- Future trends in electronic materials processing / R. Pollard.