The Chemistry of the semiconductor industry / edited by S. J. Moss and A. Ledwith.
Contributor(s): Moss, Steve J
| Ledwith, A.
Material type: 
BookPublisher: Glasgow : Blackie, 1987Description: xiv, 426 p. : ill. ; 24 cm. hbk.ISBN: 0216920051; 0412013215.Subject(s): Integrated circuits -- Design and constructionDDC classification: 541.0421 | Item type | Current library | Call number | Copy number | Status | Date due | Barcode | Item holds |
|---|---|---|---|---|---|---|---|
| General Lending | MTU Bishopstown Library Lending | 541.0421 (Browse shelf(Opens below)) | 1 | Available | 00028020 |
Enhanced descriptions from Syndetics:
This book covers the chemistry of the major processes involved in the manufacture of integrated circuits. The authors describe all the major processes in use, together with some interesting processes which are currently being developed and hold future promise. Each chapter covers the current state of knowledge of the underlying chemistry of a particular process, and identifies areas of uncertainty requiring further research.
Includes index.
Overview -- Semiconductor silicon -- Group III-V compounds -- Group II-VI semiconductors -- Chemical vapour deposition -- Plasma enhanced chemical vapour deposition -- Metal organic vapour phase epitaxy -- Liquid phase epitaxy of III-V compounds -- Photoresists -- Electron beam and x ray resits -- Wet etching -- Polyimides -- Molecular electronics -- Computer modelling of semiconductor interfaces -- Plasma etching -- Polymers in plasmas.