Radio frequency microelectromechanical systems (Topical Term)

Work cat.: Alastalo, Ari. Microelectromechanical resonator-based components for wireless communications, 2006 : (radio-frequency MEMS devices (RF MEMS))

Wikipedia, accessed online Aug. 6, 2007 (RF MEMS: The MEMS acronym stands for Micro-Electromechanical System ... RF MEMS passives, such as capacitors, inductors, resonators and switches, offer low loss, high Q factor, high linearity and good power handling ... There are various types of RF MEMS switches, switched capacitors and varactors, and they are classified by actuation method (electrostatic, magnetic, piezoelectric, thermal), by contact mechanism (capacitive, metal-to-metal), or by anchor mechanism (cantilever, fixed-fixed beam))

Rebeiz, Gabriel M. RF MEMS : theory, design, and technology, 2003.

Varadan, V.K. Vinoy, K.J. & Jose, K.A. RF MEMS and their applications, 2003.

Santos, Hector J. de los. RF MEMS circuit design for wireless communications.

McGraw-Hill dictionary of scientific and technical terms, 2003