Fundamentals of microfabrication : the science of miniaturization /
Madou, Marc J.
Fundamentals of microfabrication : the science of miniaturization / Marc J. Madou. - 2nd ed. - Boca Raton, FL : CRC Press, 2001. - 723 p. : ill. ; 29 cm. + hbk.
Includes bibliographical references and index.
Lithography -- Pattern transfer with dry etching techniques -- Pattern transfer with additive techniques -- Wet bulk micromachining -- Surface micromachining -- LIGA and micromolding -- A comparison of miniaturization techniques: top-down and bottom-up manufacturing -- Modeling, brains, packaging, sample preparation and substrate choice -- Scaling, actuators and power in miniaturized systems -- Miniaturization applications.
0849308267
2001043273
Microelectronics.
Integrated circuits--Design and construction.
Microelectromechanical systems--Design and construction.
Machining
Microelectronic packaging.
Lasers--Industrial applications.
621.38152
Fundamentals of microfabrication : the science of miniaturization / Marc J. Madou. - 2nd ed. - Boca Raton, FL : CRC Press, 2001. - 723 p. : ill. ; 29 cm. + hbk.
Includes bibliographical references and index.
Lithography -- Pattern transfer with dry etching techniques -- Pattern transfer with additive techniques -- Wet bulk micromachining -- Surface micromachining -- LIGA and micromolding -- A comparison of miniaturization techniques: top-down and bottom-up manufacturing -- Modeling, brains, packaging, sample preparation and substrate choice -- Scaling, actuators and power in miniaturized systems -- Miniaturization applications.
0849308267
2001043273
Microelectronics.
Integrated circuits--Design and construction.
Microelectromechanical systems--Design and construction.
Machining
Microelectronic packaging.
Lasers--Industrial applications.
621.38152